PP-12 Specifications

Travel Dependent

Motor Type	Piezo Motor
Max. Speed (mm/s)	1 (MMC-100), 3 (MMC-110)

Encoder Option	None (Open Loop)	Digital (RS-422)
Typical Resolution (nm)	1	20
Repeatability, bi-directional (nm)	N/A	±200
Repeatability, uni-directional (nm)	N/A	200

Environmental Options

Atmospheric

High Vacuum 10^-6 mbar

Ultra High Vacuum 10^-9 mbar